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Ultralow 0.034 dB/m loss wafer-scale integrated photonics realizing 720 million Q and 380 μW threshold Brillouin lasing

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Abstract

We demonstrate 0.034 dB/m loss waveguides in a 200-mm wafer-scale, silicon nitride (Si3N4) CMOS-foundry-compatible integration platform. We fabricate resonators that measure up to a 720 million intrinsic Q resonator at 1615 nm wavelength with a 258 kHz intrinsic linewidth. This resonator is used to realize a Brillouin laser with an energy-efficient 380 µW threshold power. The performance is achieved by reducing scattering losses through a combination of single-mode TM waveguide design and an etched blanket-layer low-pressure chemical vapor deposition (LPCVD) 80 nm Si3N4 waveguide core combined with thermal oxide lower and tetraethoxysilane plasma-enhanced chemical vapor deposition (TEOS–PECVD) upper oxide cladding. This level of performance will enable photon preservation and energy-efficient generation of the spectrally pure light needed for photonic integration of a wide range of future precision scientific applications, including quantum, precision metrology, and optical atomic clocks.

© 2022 Optica Publishing Group

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Supplementary Material (1)

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Data availability

Data underlying the results presented in this paper are not publicly available at this time but may be obtained from the authors upon reasonable request.

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Figures (2)

Fig. 1.
Fig. 1. Resonator linewidth and Q: (a) 200-mm wafer after the fabrication and dicing process; (b) resonance spectral scan at 1615 nm with the 1.078 MHz FSR MZI; (c) measured loaded and intrinsic Q values from 1550 nm to 1630 nm, where M = million; (d) a ringdown time of 444 ns, corresponding to an intrinsic Q = 775 M is measured at 1615 nm.
Fig. 2.
Fig. 2. SBS laser and threshold power measurement. (a) Setup for the SBS laser. PL, pump laser; PDH, Pound–Drever–Hall laser lock; PD, photodetector; OSA, optical spectrum analyzer. (b) Stokes power on the OSA with ∼4 mW on-chip pump power. (c) Measured S1 and S3 on-chip power with the calculated curves shows a threshold of 0.38 mW. (d) Calculated and measured threshold power and Brillouin gain from 1550 nm to 1610 nm.

Equations (1)

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Pth=π2ng2LQcGBλ2QL3,
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