Abstract

We present a compact heterodyne laser interferometer developed for high-sensitivity displacement sensing applications. This interferometer consists of customized prisms and wave plates assembled as a quasi-monolithic unit to realize a miniaturized system. The interferometer design adopts a common-mode rejection scheme to provide a high rejection ratio to common environmental noise. Experimental tests in vacuum show a displacement sensitivity level of ${11}\,\mathrm{pm/\sqrt {Hz}}$ at ${100}\,\mathrm{mHz}$ and as low as ${0.6}\,\mathrm{pm/\sqrt {Hz}}$ above ${1}\,\mathrm{pm}$. The prototype unit is ${20}\,\mathrm{mm}\times {20}\,\mathrm{mm}\times {10}\,\mathrm{mm}$ in size and weighs ${4.5}\,\mathrm{g}$, allowing subsequent integration in compact systems.

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