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Reducing feature size in femtosecond laser ablation of fused silica by exciton-seeded photoionization

Boyang Zhou, Aravinda Kar, M. J. Soileau, and Xiaoming Yu

Abstract

We demonstrate a method of laser ablation with reduced feature size by using a pair of ultrashort pulses that are partially overlapped in space. By tuning the delay between the two pulses, features within the overlapping area are obtained on the surface of fused silica. The observed dependence of the feature position on delays longer than the free-carrier lifetime indicates an ionization pathway initiated by self-trapped excitons. This method could be used to enhance the resolution of laser-based lithography.

© 2020 Optical Society of America

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Corrections

Boyang Zhou, Aravinda Kar, M. J. Soileau, and Xiaoming Yu, "Reducing feature size in femtosecond laser ablation of fused silica by exciton-seeded photoionization: publisher’s note," Opt. Lett. 45, 2174-2174 (2020)
https://opg.optica.org/ol/abstract.cfm?uri=ol-45-8-2174

26 March 2020: A typographical correction was made to the funding section.

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Supplementary Material (3)

NameDescription
Visualization 1       This video describes the temporal processing and spatial distribution of free electron density when the delay between two laser pulses is zero. The results show that the center of free electron density is spatially at the center of two pulses.
Visualization 2       This video describes the temporal processing and spatial distribution of free electron density when the delay between two laser pulses is 300 fs. The results show that the center of free electron density deviates away from the center of two pulses.
Visualization 3       This video describes the temporal processing and spatial distribution of free electron density when the delay between two laser pulses is 900 fs. Compared to the condition when the delay is 300 fs, the results show a return of the center of free elec

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