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Abstract
A beam shaping approach has been implemented to realize high-performance waveguide crossings based on cosine tapers. Devices with a compact footprint of $4.7\;\unicode{x00B5}{\rm m}\, \times$$ 4.7\;\unicode{x00B5}{\rm m}$ were fabricated on the GLOBALFOUNDRIES 45 nm monolithic silicon photonics platform (45 CLO technology). Fabricated devices are found to be nearly wavelength independent ($\pm0.035\;{\rm dB}$ for $1260\;{\rm nm} \le \lambda$$ \le 1360\;{\rm nm}$) with low insertion loss ($\sim0.2\;{\rm dB}$) and crosstalk ($-35\;{\rm dB}$). The measured response of the devices is consistent with the three-dimensional finite-difference time-domain simulation results. The design stability is validated by measuring the device insertion loss on eight chips, which is found to be $0.197 \pm 0.017\;{\rm dB}$ at the designed center wavelength of 1310 nm.
© 2020 Optical Society of America
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