High-Q tellurium-oxide-coated silicon nitride microring resonators

Abstract

We report on tellurium-oxide (${\mathrm{TeO}}_2$)-coated silicon nitride microring resonators with internal quality factors up to $7.3\times {10}^5$, corresponding to 0.5 dB/cm waveguide loss, at wavelengths around 1550 nm. The microring resonators are fabricated using a silicon nitride foundry process followed by ${\mathrm{TeO}}_2$ coating deposition in a single post-processing step. The silicon nitride strip height of 0.2 μm enables a small microring bending radius, while the ${\mathrm{TeO}}_2$ coating thickness of 0.33 μm results in a large modal overlap with the ${\mathrm{TeO}}_2$ layer. These results are a promising step towards realizing compact and high-performance linear, nonlinear, and rare-earth-doped active integrated photonic devices with this platform.

© 2018 Optical Society of America

Four-wave mixing in high-Q tellurium-oxide-coated silicon nitride microring resonators

Khadijeh Miarabbas Kiani, Hamidu M. Mbonde, Henry C. Frankis, Richard Mateman, Arne Leinse, Andrew P. Knights, and Jonathan D. B. Bradley
OSA Continuum 3(12) 3497-3507 (2020)

Thulium-doped tellurium oxide waveguide amplifier with 7.6  dB net gain on a silicon nitride chip

Khadijeh Miarabbas Kiani, Henry C. Frankis, Hamidu M. Mbonde, Richard Mateman, Arne Leinse, Andrew P. Knights, and Jonathan D. B. Bradley
Opt. Lett. 44(23) 5788-5791 (2019)

Low-loss TeO₂-coated Si₃N₄ waveguides for application in photonic integrated circuits

Henry C. Frankis, Khadijeh Miarabbas Kiani, Dawson B. Bonneville, Chenglin Zhang, Samuel Norris, Richard Mateman, Arne Leinse, Nabil D. Bassim, Andrew P. Knights, and Jonathan D. B. Bradley
Opt. Express 27(9) 12529-12540 (2019)

Design and demonstration of ultra-high-Q silicon microring resonator based on a multi-mode ridge waveguide

Yuguang Zhang, Xiao Hu, Daigao Chen, Lei Wang, Miaofeng Li, Peng Feng, Xi Xiao, and Shaohua Yu
Opt. Lett. 43(7) 1586-1589 (2018)

Ultra-high-Q thin-silicon nitride strip-loaded ring resonators

L. Stefan, M. Bernard, R. Guider, G. Pucker, L. Pavesi, and M. Ghulinyan
Opt. Lett. 40(14) 3316-3319 (2015)