Abstract

We present a systematic study of a stress coefficient of dielectric materials (SiO2, Nb2O5, and HfO2). In particular, we show a thickness dependence of the stress coefficient on layer thickness, which shows that the determination of this coefficient is complex and requires careful analysis. We then apply the different models of the stress coefficient to multilayer structures and show that stress-induced deformation can be precisely predicted in final components with a few percent accuracy.

© 2017 Optical Society of America

Full Article  |  PDF Article
OSA Recommended Articles
Multilayered analog optical differentiating device: performance analysis on structural parameters

Wenhui Wu, Wei Jiang, Jiang Yang, Shaoxiang Gong, and Yungui Ma
Opt. Lett. 42(24) 5270-5273 (2017)

Multilayer deformation planarization by substrate pit suturing

Yingjie Chai, Meiping Zhu, Huanbin Xing, Hu Wang, Yun Cui, and Jianda Shao
Opt. Lett. 41(15) 3403-3406 (2016)

Visibility of dielectrically passivated graphene films

Isaac Ruiz, Michael D. Goldflam, Thomas E. Beechem, Anthony E. Mcdonald, Bruce L. Draper, and Stephen W. Howell
Opt. Lett. 42(14) 2850-2853 (2017)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (2)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Tables (3)

You do not have subscription access to this journal. Article tables are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Equations (9)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription