Abstract
Low-loss waveguides constitute an important building block for integrated photonic systems. In this work, we investigated low-loss photonic device fabrication in chalcogenide glass using electron beam lithography followed by plasma dry etching. High-index-contrast waveguides with a low propagation loss of 0.5 dB/cm and microdisk resonators with an intrinsic quality factor (-factor) of were demonstrated. Both figures represent, to the best of our knowledge, the best low-loss results reported thus far in submicrometer single-mode chalcogenide glass devices.
© 2016 Optical Society of America
Full Article | PDF ArticleMore Like This
Jerome Lapointe, Yannick Ledemi, Sébastien Loranger, Victor Lambin Iezzi, Elton Soares de Lima Filho, Francois Parent, Steeve Morency, Younes Messaddeq, and Raman Kashyap
Opt. Lett. 41(2) 203-206 (2016)
Joan Manel Ramirez, Vladyslav Vakarin, Clement Gilles, Jacopo Frigerio, Andrea Ballabio, Papichaya Chaisakul, Xavier Le Roux, Carlos Alonso-Ramos, Gregory Maisons, Laurent Vivien, Mathieu Carras, Giovanni Isella, and Delphine Marris-Morini
Opt. Lett. 42(1) 105-108 (2017)
Luisa Ottaviano, Minhao Pu, Elizaveta Semenova, and Kresten Yvind
Opt. Lett. 41(17) 3996-3999 (2016)