Abstract

We propose a fiber-chip grating coupler that interleaves the standard full and shallow etch trenches in a 220 nm thick silicon layer to provide a directionality upward exceeding 95%. By adjusting the separation between the two sets of trenches, constructive interference is achieved in the upward direction independent of the bottom oxide thickness and without any bottom reflectors, overlays, or customized etch depths. We implement a transverse subwavelength structure in the first two grating periods to minimize back-reflections. The grating coupler has a calculated coupling efficiency of CE1.05dB with a 1 dB bandwidth of 30 nm and minimum feature size of 100 nm, compatible with deep-UV lithography.

© 2014 Optical Society of America

Full Article  |  PDF Article
OSA Recommended Articles
High-directionality fiber-chip grating coupler with interleaved trenches and subwavelength index-matching structure

Daniel Benedikovic, Carlos Alonso-Ramos, Pavel Cheben, Jens H. Schmid, Shurui Wang, Dan-Xia Xu, Jean Lapointe, Siegfried Janz, Robert Halir, Alejandro Ortega-Moñux, J. Gonzalo Wangüemert-Pérez, Iñigo Molina-Fernández, Jean-Marc Fédéli, Laurent Vivien, and Milan Dado
Opt. Lett. 40(18) 4190-4193 (2015)

L-shaped fiber-chip grating couplers with high directionality and low reflectivity fabricated with deep-UV lithography

Daniel Benedikovic, Carlos Alonso-Ramos, Diego Pérez-Galacho, Sylvain Guerber, Vladyslav Vakarin, Guillaume Marcaud, Xavier Le Roux, Eric Cassan, Delphine Marris-Morini, Pavel Cheben, Frédéric Boeuf, Charles Baudot, and Laurent Vivien
Opt. Lett. 42(17) 3439-3442 (2017)

Single-etch subwavelength engineered fiber-chip grating couplers for 1.3 µm datacom wavelength band

Daniel Benedikovic, Carlos Alonso-Ramos, Pavel Cheben, Jens H. Schmid, Shurui Wang, Robert Halir, Alejandro Ortega-Moñux, Dan-Xia Xu, Laurent Vivien, Jean Lapointe, Siegfried Janz, and Milan Dado
Opt. Express 24(12) 12893-12904 (2016)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (6)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Equations (2)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription