Abstract
A new microfabrication technology for the design and realization of and fiber-optic switches, , , and translational stages, optical scanners, fiber–fiber couplers, and fiber–planar-waveguide couplers is presented. This technology is based on bulk anisotropic etching and offers significant improvements over present micro-optical and microphotonic devices. With this new enabling technology we have fabricated –2-cm translational stages for use in beam steering and fiber-optic switching applications. We present the fabrication and characterization of a micromechanical fiber-optic switch using this new technology. These nonoptimized devices have switching times of with loss.
© 1997 Optical Society of America
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