Abstract
The first high-resolution study, to our knowledge, of the optical emission from
an Oxford Applied Research MPD21 nitrogen-plasma source is reported. The
spectroscopic results clearly show that the MPD21 nitrogen-plasma source
generates an appreciable flux of nitrogen atoms. This suggests that nitrogen
atoms are the plasma species responsible for the successful p-type doping of
ZnSe:N and related alloys.
© 1993 Optical Society of America
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