Abstract
A new method, inverse ion exchange, is proposed and demonstrated for the fabrication of single-mode channel waveguides. In this method the channel waveguide is formed by backdiffusion of the refractive-index-increasing ions from an ion-exchanged planar waveguide. Finite-difference methods are used to model the fabrication technique and to calculate the field of the fundamental mode of the waveguide. It is also proved experimentally that single-mode waveguides can be fabricated with the inverse ion-exchange method using a 10-μm mask stripe, width.
© 1990 Optical Society of America
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