Silicon antiresonant reflecting optical waveguides

Abstract

A new silicon waveguide called ARROW-C is proposed and analyzed at the 1.3-μm wavelength. The silicon structure uses two buried layers of SiO₂ or β-SiC with a thickness of 14–23 nm to permit optical tunneling for leaky-mode propagation. A propagation loss of ∼0.5 dB/cm is predicted for the TE₀ or the TM₀ mode in a 5-μm-thick Si-core layer. Novel silicon ARROW-A and ARROW-B guides are also discussed. The former uses a pair of buried GeSi layers; the latter employs buried SiO₂ and GeSi films.

© 1990 Optical Society of America

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