Abstract

This paper describes an LED ellipsometer with a continuous wavelength range of 260–1000 nm and good technical characteristics. The measurement reproducibility and stability of the ellipsometric parameters Ψ and Δ of silicon with intrinsic dioxide at the peak wavelengths of the LED radiation are no worse than 0.001 and 0.01°, respectively. At wavelengths of 365, 375, 390, 405, 420, and 465 nm, the reproducibility of the Ψ and Δ measurements of metal films is around 0.0003 and 0.001°, respectively. The spectral resolution is 4 nm. The minimum time to measure Ψ and Δ in the entire wavelength range is 20 s.

© 2016 Optical Society of America

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