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A study of the effect of the use of immersion fluid on the angular errors in dials fabricated by lift-off photolithography

D. Yu. Kruchinin and E. P. Farafontova

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Abstract

We discuss the results of a study of the effect of immersion fluid used in contact exposures in the process of lift-off photolithography on the angular errors in circular optical scales (dials).

© 2016 Optical Society of America

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