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Nonlinear and electron-beam-induced absorption in pure quartz glasses at the wavelengths of excimer lasers

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Abstract

The two-photon absorption coefficients β at wavelengths 248 and 193nm with pulse widths 80 and 60ns, respectively, have been measured in KS-4V, KU-1, and Corning 7980 glasses. The value of β at 248nm in KS-4V was 0.16cm/GW, which was about 30% higher than in the other glasses. At a wavelength of 193nm, the value of β virtually coincided at a level of 1.1cm/GW in all the samples. The coupling factors between the electron-beam (EB)-induced quasi-steady-state optical density at wavelengths 353, 248, and 193nm and the EB power density on the samples were measured for the same glasses, using the radiations of XeF, KrF, and ArF lasers. These factors in KS-4V were 1, 4, and 6cm<sup>2</sup>/GW, respectively. The measurement error did not exceed 50%.

© 2009 Optical Society of America

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