Abstract
This paper gives an estimate of the limiting allowable deviations of the microrelief parameters of diffractive optical elements (DOEs) based on processing errors. Results are presented for the modelling and from a numerical experiment to estimate how processing errors in the formation of microrelief affect the quality of DOEs. An attempt is made to introduce a single parameter to characterize the quality of DOEs. The effect of the spectral line width of laser radiation on the operating quality of DOEs is studied, as well as the operation of DOEs at non-reference wavelengths. © 2004 Optical Society of America
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