Abstract

The theory of reflection at the surfaces of metals and semiconductors (with special reference to the latter) is considered.

Convenient equations for calculating the real and imaginary parts of n2 ( n is the complex index) from measurements of Δ (the phase difference) and ψ (tanψ=a2=the ratio of the two reflection coefficients) for one angle of incidence are derived. A second set of equations for calculating the optical constants when either ψ or Δ have been measured at two angles of incidence are given. The errors are analyzed to show which method is most sensitive when the constants are in certain ranges. Difficulties caused by inhomogeneity near the surface and by surface films are discussed, and possible methods of elimination are suggested.

© 1955 Optical Society of America

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Equations (40)

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