Abstract
Infrared absorption spectroscopy (IAS) is currently a powerful tool for gas sensing. Gas sensors based on IAS show advantages of high sensitivity, good selectivity and in-situ measurement. Typical infrared gas sensors include sensors based on discrete optics, hollow-core fiber sensors and on-chip sensors, suitable for different application environments. Discrete sensors and hollow-core fiber sensors have a relatively large volume and a heavy weight, but due to large light-gas interaction length (tens of meters or even kilometers), their sensitivity is obviously higher than on-chip gas sensors. Mature complementary metal oxide semiconductor (CMOS) fabrication process promotes the development of miniaturized on-chip sensors, which is portable in size, low in power consumption and light in weight. But the small on-chip sensor volume limits the interaction effect between light and gas analyte. Sensing techniques such as slow-light enhanced absorption spectroscopy and surface-enhanced infrared absorption spectroscopy are proposed to improve the on-chip sensing performance. In this paper, we review the gas sensing principle based on IAS briefly and the recent progress of the three kinds of sensors using different spectroscopy techniques. Finally, some conclusions and an outlook of IAS gas sensors are reached.
PDF Article
More Like This
Mid-infrared auto-correction on-chip waveguide gas sensor based on 2f/1f wavelength modulation spectroscopy
Mingquan Pi, Chuantao Zheng, Huan Zhao, Jialin Ji, Zihang Peng, Yuting Min, Yijun Huang, Xueying Wang, Gangyun Guan, Fang Song, Lei Liang, Yu Zhang, Yiding Wang, and Frank K. Tittel
Opt. Lett. 49(2) 190-193 (2024)
Cited By
You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.
Contact your librarian or system administrator
or
Login to access Optica Member Subscription
Add to BibSonomy