Abstract

We present the introduction of high-speed phase modulators based on the quantum-confined Stark effect to the generic InP foundry platform at Fraunhofer HHI. An overview of the technological integration of the high-speed phase Mach-Zehnder modulators (MZM) to the existing generic foundry process is described. In addition, an electro-optical behavioral model for the high speed MZM, which gives insight into the influence of design parameters on performance, is discussed. The presented MZM structure with a traveling wave electrode length of 5 mm has a $V_\pi$ of 1.4 V and a small signal electro-optic 3 dB bandwidth of 32 GHz. Large signal RF operation up to 80 Gbps is demonstrated. To the best of our knowledge, these are the highest-performance MZMs in an InP open access integrated photonics foundry platform.

Integration of a high-efficiency Mach-Zehnder modulator with a DFB laser using membrane InP-based devices on a Si photonics platform

Tatsurou Hiraki, Takuma Aihara, Takuro Fujii, Koji Takeda, Yoshiho Maeda, Takaaki Kakitsuka, Tai Tsuchizawa, and Shinji Matsuo
Opt. Express 29(2) 2431-2441 (2021)

10 Gb/s InP-based Mach-Zehnder modulator for operation at 2 μm wavelengths

M. U. Sadiq, M. R. Gleeson, N. Ye, J. O’Callaghan, P. Morrissey, H. Y. Zhang, K. Thomas, A. Gocalinska, E. Pelucchi, F. C. G. Gunning, B. Roycroft, F. H. Peters, and B. Corbett
Opt. Express 23(9) 10905-10913 (2015)

High-speed, low-loss silicon Mach–Zehnder modulators with doping optimization

Xi Xiao, Hao Xu, Xianyao Li, Zhiyong Li, Tao Chu, Yude Yu, and Jinzhong Yu
Opt. Express 21(4) 4116-4125 (2013)

Micro-transfer printing InP C-band SOAs on advanced silicon photonics platform for lossless MZI switch fabrics and high-speed integrated transmitters

Jing Zhang, Laurens Bogaert, Clemens Krückel, Emadreza Soltanian, Hong Deng, Bahawal Haq, Johanna Rimböck, Joris Van Kerrebrouck, Guy Lepage, Peter Verheyen, Joris Van Campenhout, Peter Ossieur, Dries Van Thourhout, Geert Morthier, Wim Bogaerts, and Gunther Roelkens
Opt. Express 31(26) 42807-42821 (2023)

High speed hybrid silicon evanescent Mach-Zehnder modulator and switch

Hui-Wen Chen, Ying-hao Kuo, and John E. Bowers
Opt. Express 16(25) 20571-20576 (2008)