Abstract
Recently, near-field optical tweezers integrated on a chip based on silicon on insulator (SOI) have attracted more attention and are promising for biological and chemical analyses. Here we propose a low-loss Si waveguide tapered from 800 nm width to 200 nm over 4 μm, then back to 800 nm again, with a high intensity gradient in the electric field to trap microparticles whose diameters vary from 1 μm to 5 μm. The high transmittance allows for cascading the traps along the direction of light propagation. Optical forces in all three dimensions are analyzed around a high-stiffness potential well obtained. Moreover, a dynamic model is applied to analyze the motion processes of microparticles.
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