Abstract
A reflection-type MEMS multifunction-integrated optical device using the
combined in-plane and out-of-plane motion of a dual-slope mirror is
proposed. The motion of the mirrors results in the corresponding optical
axis offsets in the transmitting and receiving optical signals, which can
enable the device with variable optical power splitting, optical switching
and variable optical attenuating functions. The optical models for splitting
and attenuating are presented, respectively. The electro-mechanical
characteristics of the device are also investigated. Measurements of the
fabricated devices show that the switching times is less than 9 ms. The
excess loss of the device is less than 3 dB and the controllable attenuation
range is up to 39 dB, respectively. Moreover, polarization-dependent loss is
less than 0.7 dB in the whole attenuation and splitting range.
© 2010 IEEE
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