Abstract

We have studied the effect of optical interference on element profiles obtained with a glow discharge optical emission spectrometer (GDS). The specimens were borophosphosilicate glass films deposited on polished silicon wafers. We found that in some cases the interference is accompanied with a beat in the profile: a damping of the sinusoidal wave followed by a recovery. Profilometry showed that the depth resolution is better when the interference continues continuously without a beat. We showed by simulation that the cause of the beat came from variation of the penetration rate throughout the sputtered area.

Multilayer optical interference coatings via glow discharge polymerization techniques

J. C. Lee
Appl. Opt. 17(16) 2645-2647 (1978)

Infrared emission spectroscopy of glow discharge formed in low pressure atmospheric gases

H. Sakai, P. Hansen, M. Esplin, R. Johansson, M. Peltola, and J. Strong
Appl. Opt. 21(2) 228-235 (1982)

Glow Discharge Resonance

A. B. Stewart
J. Opt. Soc. Am. 45(8) 651-657 (1955)

The Photoelectric Effect in Glow-Discharge Tubes

Herbert J. Reich
J. Opt. Soc. Am. 17(4) 271-288 (1928)

Emission Spectra During Glow-Discharge Decomposition of Ammonia

D. C. Carbaugh and J. M. Marchello
J. Opt. Soc. Am. 56(6) 836-837 (1966)