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Optica Publishing Group
  • Applied Spectroscopy
  • Vol. 30,
  • Issue 2,
  • pp. 233-234
  • (1976)

Electron Microbeam Probe Diagnostics on Ion Scattering Craters

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Abstract

Surface analysis techniques such as ion scattering spectroscopy (ISS) and secondary ion mass spectroscopy (SIMS) use a beam of inert ions of approximately 0.5 to 3.0 ke V energy to slowly sputter away the surface of a solid material. The energy of the scattered ion is then measured (ISS) or the mass spectrum is recorded for the sputtered ionic species (SIMS) to provide an elemental profile analysis.

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