The Application of Intensity Transients in Ellipsometry

V. Brusic; M. A. Genshaw; B. D. Cahan

doi:10.1364/AO.9.001634

Applied Optics
Vol. 9,
Issue 7,
pp. 1634-1638
(1970)
•https://doi.org/10.1364/AO.9.001634

The Application of Intensity Transients in Ellipsometry

V. Brusic, M. A. Genshaw, and B. D. Cahan

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V. Brusic, M. A. Genshaw, and B. D. Cahan, "The Application of Intensity Transients in Ellipsometry," Appl. Opt. 9, 1634-1638 (1970)

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Abstract

The measurement of intensity offers a means of obtaining faster ellipsometric readings than are possible by manual nulling techniques. An analysis of the theoretical intensity relations gives rise to a technique of separately determining the changes in Δ and ψ by the use of successive transients. An experimental verification of the technique for the oxidation of iron was obtained.

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(a) Calculated maximum errors in the transients for Δ due to the interaction of dψ, if the analyzer is kept at A₀
Initial settings	Expected change in P (deg)	(P − P₀)_final (deg)	(A − A₀)_final (deg)	Error (%)
(P − P₀) = 25; (A − A₀) = 0	10	35	+1	+2.06
	10	35	−1	−1.83
	10	35	+0.5	+0.99
	10	35	−0.5	−0.93

(b) Calculated maximum errors in the transients for Δ due to the interaction of dψ, if the analyzer is kept at A_optimal (as calculated from Eq. (4) and Fig. 1)
Initial settings	Expected change in P (deg)	(P − P₀)_final (deg)	(A − A₀)_final (deg)	Error (%)

(P − P₀) = 25; (A − A_opt) = 24.61°	10	35	−4.89	+0.919
	10	35	−6.89	−0.693
	10	35	−5.39	+0.432
	10	35	−6.39	−0.376

(c) Deviation from linearity in the curve I vs dP
Initial settings	Expected change in P (deg)	(P − P₀)_final (deg)	(A − A₀)_final (deg)	Deviation from linearity

(P − P₀) = 45; (A − A₀) = 0	5	30	0	at P = 47.45, −0.488%
(P − P₀) = 25; (A − A₀) = 0	10	35	0	at P = 28.75, −1.577%

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Applied Optics