Abstract

Following ultrafast laser machining of fused silica, post-processing such as polishing and honing are typically required for edges. In this study, we employed a spatial light modulator (SLM) to generate the 2D Airy–Gaussian beam to prepare the convex edges in fused silica by using a single pass of a picosecond laser. It is found that, if the speed exceeds 5 mm/s, there would be plasma interference which is unfavorable for the separation process. A filament effect was observed when the internal laser peak power exceeds the damage threshold of fused silica. The shape of the convex edges was consistent with the propagation path of the 2D Airy–Gaussian beam inside the fused silica before separation. The inclination angle was 17° and 13°, respectively, on the upper and lower end of the edges. The results of this study provide a new, to our knowledge, method for the preparation of curved structures with different curvatures in transparent materials.

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