Abstract

White-light scanning interferometry is a mature non-contact three-dimensional shape detection method. However, the batwing effect is an inherent problem that causes systematic error. In this paper, we proposed an algorithm for detecting and eliminating the batwing effect based on the Haar wavelet transforms without any prior knowledge of the sample surface. It is verified by simulation and experiment that the proposed algorithm can effectively eliminate the batwing effect and does not increase the time complexity significantly.

© 2024 Optica Publishing Group

Surface recovery algorithm in white light interferometry based on combined white light phase shifting and fast Fourier transform algorithms

Quangsang Vo, Fengzhou Fang, Xiaodong Zhang, and Huimin Gao
Appl. Opt. 56(29) 8174-8185 (2017)

Gap-matching algorithm with the impCEEMDAN in scanning white-light interference microscopy

Mei Sang, Xiangyu Du, Shuang Wang, Tianhua Xu, Jie Dong, and Tiegen Liu
Opt. Express 28(10) 15101-15111 (2020)

Envelope peak detection algorithm based on the CEEMDAN in white light interferometry

Yinrui Li, Yingzhe Yang, Jiale Zhang, Qun Yuan, and Yiyong Liang
Opt. Continuum 2(8) 1875-1888 (2023)

Fast template matching method in white-light scanning interferometry for 3D micro-profile measurement

Yiliang Huang, Jian Gao, Lanyu Zhang, Haixiang Deng, and Xin Chen
Appl. Opt. 59(4) 1082-1091 (2020)

Phase-error-compensation-based surface recovery algorithm using spectrum selection for white light interferometry

Long Ma, Yuan Zhao, Mei-Ye Du, Xin Pei, Xing-Jie Feng, Feng-Ming Sun, and Shao-Bo Fang
Appl. Opt. 60(21) 6030-6043 (2021)