Amorphous dielectric optical coatings deposited by plasma ion-assisted electron beam evaporation for gravitational wave detectors

Carlos Garcia Nuñez; Gavin Wallace; Lewis Fleming; Kieran Craig; Shigeng Song; Shigeng Song; Sam Ahmadzadeh; Caspar Clark; Caspar Clark; Simon Tait; Iain Martin; Stuart Reid; Sheila Rowan; Des Gibson

doi:10.1364/AO.477186

Applied Optics
Vol. 62,
Issue 7,
pp. B209-B221
(2023)
•https://doi.org/10.1364/AO.477186

Amorphous dielectric optical coatings deposited by plasma ion-assisted electron beam evaporation for gravitational wave detectors

Carlos Garcia Nuñez, Gavin Wallace, Lewis Fleming, Kieran Craig, Shigeng Song, Sam Ahmadzadeh, Caspar Clark, Simon Tait, Iain Martin, Stuart Reid, Sheila Rowan, and Des Gibson

Not Accessible

Your library or personal account may give you access

Get PDF
Email
Share
Get Citation
Copy Citation Text
Carlos Garcia Nuñez, Gavin Wallace, Lewis Fleming, Kieran Craig, Shigeng Song, Sam Ahmadzadeh, Caspar Clark, Simon Tait, Iain Martin, Stuart Reid, Sheila Rowan, and Des Gibson, "Amorphous dielectric optical coatings deposited by plasma ion-assisted electron beam evaporation for gravitational wave detectors," Appl. Opt. 62, B209-B221 (2023)

Export Citation
- BibTex
- Endnote (RIS)
- HTML
- Plain Text
Citation alert
Save article

Check for updates

Abstract

Coating thermal noise (CTN) in amorphous coatings is a drawback hindering their application in precision experiments such as gravitational wave detectors (GWDs). Mirrors for GWDs are Bragg’s reflectors consisting of a bilayer-based stack of high- and low-refractive-index materials showing high reflectivity and low CTN. In this paper, we report the characterization of morphological, structural, optical, and mechanical properties of high-index materials such as scandium sesquioxide and hafnium dioxide and a low-index material such as magnesium fluoride deposited by plasma ion-assisted electron beam evaporation. We also evaluate their properties under different annealing treatments and discuss their potential for GWDs.

Full Article | PDF Article

More Like This

Tantalum oxide and silicon oxide mixture coatings deposited using microwave plasma assisted co-sputtering for optical mirror coatings in gravitational wave detectors

Shigeng Song, Sijia Cai, Daxing Han, Carlos García Nuñez, Gong Zhang, Gavin Wallace, Lewis Fleming, Kieran Craig, Stuart Reid, Iain W. Martin, Sheila Rowan, and Des Gibson
Appl. Opt. 62(7) B73-B78 (2023)

Ultraviolet optical and microstructural properties of MgF₂ and LaF₃ coatings deposited by ion-beam sputtering and boat and electron-beam evaporation

Detlev Ristau, Stefan Günster, Salvador Bosch, Angela Duparré, Enrico Masetti, Josep Ferré-Borrull, George Kiriakidis, Francesca Peiró, Etienne Quesnel, and Alexander Tikhonravov
Appl. Opt. 41(16) 3196-3204 (2002)

Progress in the measurement and reduction of thermal noise in optical coatings for gravitational-wave detectors

M. Granata, A. Amato, G. Cagnoli, M. Coulon, J. Degallaix, D. Forest, L. Mereni, C. Michel, L. Pinard, B. Sassolas, and J. Teillon
Appl. Opt. 59(5) A229-A235 (2020)

Previous Article Next Article

Supplementary Material (1)

Name	Description
Supplement 1	Supplementary material

Data availability

Data underlying the results presented in this paper are not publicly available at this time but may be obtained from the authors upon reasonable request.

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Figures (10)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Tables (5)

You do not have subscription access to this journal. Article tables are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Equations (2)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

				Glass flow (sccm)
Material	$I_{AC}$ (A)	$V_{AC}$ (V)	$I_{EX}$ (A)	$O_{2}$	$A r_{Cathode}$	$A r_{Anode}$	Induction power heater (kW)	e-beam evap. Rate (Å/s)
$S c_{2} O_{3}$	43	140	10	97	6	6	1.5	1
$H f O_{2}$	43	140	10	97	7	7	1.5	0.7
$M g F_{2}$	43	130	10	—	7	7	1.5	15

	Absorption (ppm) at $λ = 1064 n m$		Extinction coefficient, $k$ ( $10^{- 5}$ ) at $λ = 1064 n m$
Material	This work	Others	This work	Others
$H f O_{2}$	$26.0 \pm 0.4$	13-30 (PIAD) [44]	$1.00 \pm 0.02$	—
$S c_{2} O_{3}$	$16 \pm 2$	18 (IBS) [45]	$0.37 \pm 0.02$	0.001 (RMS) [57]
$M g F_{2}$	$840 \pm 80$	—	$21 \pm 2$	32 (evaporation) [36]
				10.62 (IBS) [13]

	Atomic ratio (y/x)
Coating	Stoichiometric film	This work	Other deposition techniques
$H f_{x} O_{y}$	2.0	3.4	2.00 (ALD) [32]
			1.96 (RMS) [34]
			2.00 (RBTD) [12]
			2.00 (IBS) [35]
$M g_{x} F_{y}$	2.0	1.7	1.95 (EBE) [36]
			1.95 (IBAD) [50]
			1.90 (RMS) [37]
			1.92 (IBS) [13]
$S c_{x} O_{y}$	1.5	2.1	1.49–1.53 (ALD) [32,33]
			1.53 (RMS) [24]
			1.52 (PLD) [25]
			1.50 (IBS) [22,23]
			1.51 (RBTD) [14]

Sample (thickness)	Frequency (Hz)	$ϕ_{s u b s t r a t e} (\times 1 0^{- 6})$	$ϕ_{c o a t e d} (\times 1 0^{- 6})$	$E_{s} / E_{c}$	$ϕ_{c o a t i n g} (\times 1 0^{- 4})$
$S c_{2} O_{3}$ (396 nm)	556	$1.82 \pm 0.02$	$4.26 \pm 0.03$	169.41	$4.1 \pm 0.1$
	1277	$2.15 \pm 0.04$	$6.39 \pm 0.06$	170.39	$7.22 \pm 0.06$
	3387	$1.83 \pm 0.05$	$6.89 \pm 0.04$	163.60	$8.3 \pm 0.1$
	4786	$1.93 \pm 0.03$	$5.32 \pm 0.03$	162.50	$5.5 \pm 0.1$
$M g F_{2}$ (345 nm)	549	$1.73 \pm 0.03$	$8.23 \pm 0.03$	275.65	$17.92 \pm 0.07$
	1266	$1.41 \pm 0.03$	$9.35 \pm 0.03$	280.79	$22.29 \pm 0.06$
	4763	$1.35 \pm 0.02$	$8.15 \pm 0.03$	269.56	$18.30 \pm 0.01$
$H f O_{2}$ (238 nm)	513	$1.01 \pm 0.05$	$7.13 \pm 0.04$	314.29	$19.2 \pm 0.3$
	1189	$1.95 \pm 0.04$	$4.25 \pm 0.01$	308.68	$7.1 \pm 0.2$
	2076	$2.72 \pm 0.03$	$6.25 \pm 0.05$	304.85	$10.8 \pm 0.1$
	3132	$1.86 \pm 0.02$	$5.37 \pm 0.03$	307.82	$10.8 \pm 0.2$

	Refractive index, $n$ (at $λ = 1064 n m$ )
Material	EBE (this work)	Others
$H f O_{2}$	$1.89 \pm 0.02$	1.88 (EBE) [55]
		1.95 (PIAD) [44]
		2.09 (IBS) [12]
$S c_{2} O_{3}$	$1.75 \pm 0.03$	1.95 (IBS) [45]
		1.91-1.97 (RMS) [57]
$M g F_{2}$	$1.33 \pm 0.03$	1.42 (evaporation) [36]
		1.405 (IBS) [13]
		1.30-1.38 (KMS) [58]
		1.37-1.44 (IBAD) [59]

Abstract

Supplementary Material (1)

Data availability

Cited By

Figures (10)

Tables (5)

Equations (2)

Applied Optics