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High-precision detection method for an object edge based on a position-sensitive detector

Yusheng Zhai, Yiheng Zhao, Saisai Yan, Zhifeng Zhang, Lijie Geng, Ruiliang Zhang, Kun Yang, and Cuifang Kuang

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Abstract

The paper proposed and verified a method of object edge detection based on the innovative defect spot working mode of the position-sensitive detector (PSD). With the output characteristics of the PSD in the defect spot mode and the size transformation properties of a focused beam, edge-detection sensitivity could be improved. Calibration experiments with the piezoelectric transducer (PZT) and object edge-detection experiments indicate that the object edge-detection sensitivity and accuracy of our method could reach 1 and 20 nm, respectively. Therefore, this method can be widely used in high-precision alignment, geometric parameters measurement, and other fields.

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The data underlying the results presented in this paper are not publicly available at this time but may be obtained from the authors upon reasonable request.

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