Abstract

We propose a compact angle-resolving spectral ellipsometry. Using the structured light generated from a digital micro-mirror device (DMD), what we believe to be a novel pattern is illuminated to the back focal plane of the high numerical aperture (NA) objective lens. As a result, ellipsometric parameters with fine resolution of both the wavelength and incidence angle domain can be directly measured. The incidence angle can be resolved by resolution under 1° ranging from 35° to 59° by the radius of the projected images. A spectrometer as a detector enables acquisition by the resolution of 0.7 nm from 410 to 700 nm, and the fiber reduces measurement spot size to a single micrometer. Additionally, the measurement process does not require any rotating optical components or moving parts, needing only digital modification of the projected image. This simplifies the sequences and reduces the measurement time. The 2D (angle of incidence and spectral domain) ellipsometric parameter plane measured by the proposed method was used to measure the thickness of various samples. The measurement result was verified in comparison with a commercial ellipsometer. The accuracy and precision of the result show that the proposed method is capable of precise measurement of thin films.

© 2023 Optica Publishing Group

Single-shot multispectral angle-resolved ellipsometry

Garam Choi, Seung Woo Lee, Sin Yong Lee, and Heui Jae Pahk
Appl. Opt. 59(21) 6296-6303 (2020)

Robust incident angle calibration of angle-resolved ellipsometry for thin film measurement

Lihua Peng, Dawei Tang, Jian Wang, Rong Chen, Feng Gao, and Liping Zhou
Appl. Opt. 60(13) 3971-3976 (2021)

Coaxial spectroscopic imaging ellipsometry for volumetric thickness measurement

Seung Woo Lee, Garam Choi, Sin Yong Lee, Yeongchan Cho, and Heui Jae Pahk
Appl. Opt. 60(1) 67-74 (2021)

Polarized angle-resolved spectral reflectometry for real-time ultra-thin film measurement

Jian Wang, Lihua Peng, Fuqi Zhai, Dawei Tang, Feng Gao, Xiangchao Zhang, Rong Chen, Liping Zhou, and Xiangqian Jane Jiang
Opt. Express 31(4) 6552-6565 (2023)

Co-axial spectroscopic snap-shot ellipsometry for real-time thickness measurements with a small spot size

Seung Woo Lee, Sin Yong Lee, Garam Choi, and Heui Jae Pahk
Opt. Express 28(18) 25879-25893 (2020)