Abstract

The paper proposes an approach for the pre-production selection of the most promising combination of a monochromatic monitoring strategy and a monitoring algorithm used for predicting termination of layer deposition. The approach is based on the previously introduced estimate of the strength of the expected error self-compensation effect and the new estimate, to the best of our knowledge, of the strength of the cumulative effect of thickness error growth presented in this paper. The application of the proposed approach is demonstrated using computational manufacturing experiments with various types of optical coating designs.

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Advanced algorithms for monochromatic monitoring of complex optical coatings

A. Tikhonravov, Iu. Lagutin, A. Lagutina, B. Romanov, and A. Yagola
Appl. Opt. 62(30) 7904-7909 (2023)

Statistical approach to choosing a strategy of monochromatic monitoring of optical coating production

A. V. Tikhonravov, M. K. Trubetskov, and T. V. Amotchkina
Appl. Opt. 45(30) 7863-7870 (2006)

Computational experiments on optical coating production using monochromatic monitoring strategy aimed at eliminating a cumulative effect of thickness errors

Alexander V. Tikhonravov, Michael K. Trubetskov, and Tatiana V. Amotchkina
Appl. Opt. 46(28) 6936-6944 (2007)

Self-compensation of errors in optical coating production with monochromatic monitoring

A. V. Tikhonravov, A. A. Lagutina, Iu. S. Lagutin, D. V. Lukyanenko, I. V. Kochikov, and A. G. Yagola
Opt. Express 29(26) 44275-44282 (2021)

Elimination of cumulative effect of thickness errors in monochromatic monitoring of optical coating production: theory

A. V. Tikhonravov and M. K. Trubetskov
Appl. Opt. 46(11) 2084-2090 (2007)