Understanding the tool influence function during sub-aperture belt-on-wheel glass polishing

T. Suratwala; J. Ross; R. Steele; G. Tham; L. Wong; F. Wolfs; S. Defisher; R. Bechtold; M. Rinkus; C. Mah

doi:10.1364/AO.476547

Applied Optics
Vol. 62,
Issue 1,
pp. 91-101
(2023)
•https://doi.org/10.1364/AO.476547

Understanding the tool influence function during sub-aperture belt-on-wheel glass polishing

T. Suratwala, J. Ross, R. Steele, G. Tham, L. Wong, F. Wolfs, S. Defisher, R. Bechtold, M. Rinkus, and C. Mah

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T. Suratwala, J. Ross, R. Steele, G. Tham, L. Wong, F. Wolfs, S. Defisher, R. Bechtold, M. Rinkus, and C. Mah, "Understanding the tool influence function during sub-aperture belt-on-wheel glass polishing," Appl. Opt. 62, 91-101 (2023)

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- Optical Design and Fabrication
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About this Article
History
- Original Manuscript: September 26, 2022
- Revised Manuscript: November 22, 2022
- Manuscript Accepted: November 23, 2022
- Published: December 16, 2022

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Abstract

The tool influence function (TIF) during sub-aperture belt-on-wheel polishing has been evaluated as a function of various process conditions (belt use/wear, dwell time, displacement, belt velocity, and wheel modulus and diameter) on fused silica glass workpieces using ${{\rm CeO}_2}$ polishing media. TIF spots are circular or elliptical in shape with a largely flat bottom character. The volumetric removal rate varies significantly with belt use (or wear), stabilizing after ${\sim}{15}\;{\rm min}$ of use. A modified Preston model, where the pressure dependence is adjusted using a different scaling of the wheel modulus ($E_w^{0.5}$), largely predicts the volumetric removal rate over the range of process conditions evaluated. The relatively high volumetric removal rate of ${30 - 60}\;{{\rm mm}^3}/{\rm h}$ using a fixed ${{\rm CeO}_2}$-in-resin-host belt offers a rapid, and hence, more economical, initial polish of aspheric and freeform optics.

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Process Variable	Variable (Units)	TIF Series
		$A$	$B$	$C$	$D$	$E$	$F$
		Belt Use Time	Dwell Time	Displacement	Relative Velocity	Wheel Modulus	Wheel Radius
Belt use time	$t$ (min)		15.2	15.2	15.2	15.2	15.2
Spot dwell time	$t_{dwell}$ (sec)	5		5	5	5	5
Tool displacement	$d_{t}$ (µm)	200	200		200	200	200
Relative velocity	$V_{r}$ (m/sec)	0.29	0.29	0.29		0.29	0.29
Wheel modulus	$E_{w}$ (MPa)	15.1	15.1	15.1	15.1		15.1
Major wheel radius	$r_{1}$ (mm)	20	20	20	20	20
Minor wheel radius	$r_{2}$ (mm)	12	12	12	12	12
Belt type	NA	Fixed ${C e O}_{2}$	Fixed ${C e O}_{2}$	${C e O}_{2}$	${C e O}_{2}$	Fixed ${C e O}_{2}$	Fixed ${C e O}_{2}$
Slurry	NA	Coolant	Coolant	${C e O}_{2}$	${C e O}_{2}$	Coolant	Coolant
Belt pre-use	(min)	0	15	15	15	15	15

Tool Name	Description	Contact Size^a (mm)	Pressure (psi)	Relative Velocity (m/s)	Displacement (µm)	Volumetric Removal Rate ( ${m m}^{3} / h$ )
MRF	Magneto-rheological fluid ribbon^b	$3 \times 6$	0.02	1.6	300	1
		$5 \times 11$	0.03	2.4	300	4
		$6 \times 12$	0.05	3.9	300	15
Bonnet	Bonnet hemispherical bladder [29,30]^c	$6 \pm 1$	nm^e	0.3	300	$0.7 \pm 0.3$
		15	7.5	4.8	500	18
		22	7.5	4.8	1000	150
Smoothing	Flat pad foam^d	25	$27 \pm 11$	0.3	500	$6.6 \pm 3.6$
ADAPT	Hemispherical pad-foam [2]	$6 \pm 1$	$12 \pm 2$	0.5	$100 \pm 50$	$5 \pm 4$
Belt-on-Wheel	Linear belt (this study)	$6 \pm 1$	$100 \pm 80$	$0.7 \pm 0.4$	200	$45 \pm 15$

Process Variable	Variable (Units)	TIF Series
		$A$	$B$	$C$	$D$	$E$	$F$
		Belt Use Time	Dwell Time	Displacement	Relative Velocity	Wheel Modulus	Wheel Radius
Belt use time	$t$ (min)		15.2	15.2	15.2	15.2	15.2
Spot dwell time	$t_{dwell}$ (sec)	5		5	5	5	5
Tool displacement	$d_{t}$ (µm)	200	200		200	200	200
Relative velocity	$V_{r}$ (m/sec)	0.29	0.29	0.29		0.29	0.29
Wheel modulus	$E_{w}$ (MPa)	15.1	15.1	15.1	15.1		15.1
Major wheel radius	$r_{1}$ (mm)	20	20	20	20	20
Minor wheel radius	$r_{2}$ (mm)	12	12	12	12	12
Belt type	NA	Fixed ${C e O}_{2}$	Fixed ${C e O}_{2}$	${C e O}_{2}$	${C e O}_{2}$	Fixed ${C e O}_{2}$	Fixed ${C e O}_{2}$
Slurry	NA	Coolant	Coolant	${C e O}_{2}$	${C e O}_{2}$	Coolant	Coolant
Belt pre-use	(min)	0	15	15	15	15	15

Tool Name	Description	Contact Size^a (mm)	Pressure (psi)	Relative Velocity (m/s)	Displacement (µm)	Volumetric Removal Rate ( ${m m}^{3} / h$ )
MRF	Magneto-rheological fluid ribbon^b	$3 \times 6$	0.02	1.6	300	1
		$5 \times 11$	0.03	2.4	300	4
		$6 \times 12$	0.05	3.9	300	15
Bonnet	Bonnet hemispherical bladder [29,30]^c	$6 \pm 1$	nm^e	0.3	300	$0.7 \pm 0.3$
		15	7.5	4.8	500	18
		22	7.5	4.8	1000	150
Smoothing	Flat pad foam^d	25	$27 \pm 11$	0.3	500	$6.6 \pm 3.6$
ADAPT	Hemispherical pad-foam [2]	$6 \pm 1$	$12 \pm 2$	0.5	$100 \pm 50$	$5 \pm 4$
Belt-on-Wheel	Linear belt (this study)	$6 \pm 1$	$100 \pm 80$	$0.7 \pm 0.4$	200	$45 \pm 15$

Abstract

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Applied Optics