Illumination uniformity correction by using dynamic gray filters in a lithography system

Shuang Gong; Shuang Gong; Baoxi Yang; Huijie Huang

doi:10.1364/AO.449787

Applied Optics
Vol. 61,
Issue 10,
pp. 2706-2714
(2022)
•https://doi.org/10.1364/AO.449787

Illumination uniformity correction by using dynamic gray filters in a lithography system

Shuang Gong, Baoxi Yang, and Huijie Huang

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Shuang Gong, Baoxi Yang, and Huijie Huang, "Illumination uniformity correction by using dynamic gray filters in a lithography system," Appl. Opt. 61, 2706-2714 (2022)

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Abstract

Illumination-integrated nonuniformity (IINU) is a key factor in determining resolution and critical dimension uniformity, which are important performance parameters in advanced lithography systems. To further reduce the IINU, a uniformity correction technology was adopted. In this paper, a low-cost and simple-structure approach for uniformity correction with higher flexibility and better correction capability is proposed. The method is composed of two dynamic gray filters with a specific transmittance distribution, which can form different correction curves by controlling the displacement of the gray filters. The frequency limitation of the defocus uniformity correction system is analyzed. A uniformity correction system design method based on the particle swarm optimization algorithm is introduced. Based on the proposed method, a dynamic gray filter uniformity correction system is applied to an illumination optical system. The experimental results show that the value of the corrected IINU reaches less than 0.7%, which satisfies the IINU requirements of advanced lithography systems. This verifies the higher flexibility and better correction capability of the proposed method.

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Data availability

Data underlying the results presented in this paper are not publicly available at this time but may be obtained from the authors upon reasonable request.

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Item	Experiment Parameters
Wavelength	KrF excimer laser 248 nm
Illumination mode and coherence factor	conventional $σ_{o u t} = 0.28$ ; $σ_{o u t} = 0.88$ ;
	annular $σ_{i n} = 0.47$ , $σ_{o u t} = 0.72$ ; $σ_{i n} = 0.64$ , $σ_{o u t} = 0.88$ ;
	quadrupole $σ_{i n} = 0.64$ , $σ_{o u t} = 0.88$ ; $σ_{i n} = 0.28$ , $σ_{o u t} = 0.55$ ;
	C-quadrupole $σ_{i n} = 0.64$ , $σ_{o u t} = 0.88$ ; $σ_{i n} = 0.28$ , $σ_{o u t} = 0.55$ ;
Illumination field in mask plane ( $x * y$ )	$104 m m \times 20 m m$
Defocus values ( $Δ z$ )	dynamic gray filters 1 61.9 mm
Defocus values ( $Δ z$ )	dynamic gray filters 2 59.4 mm
IINU	$c o n v e n t i o n a l / a n n u l a r < 0.7 %$
IINU	$q u a d r u p o l e / C - q u a d r u p o l e < 0.9 %$
INU	$< 1.5 %$

Illumination	Coherence	$U_{I N U}$			$U_{N U}$
Mode	Factor	Uncorrected	Corrected (Exp)	Corrected (Sim)	Uncorrected	Corrected (Exp)	Corrected (Sim)
Conventional	$σ_{o u t} = 0.28$	1.449%	0.667%	0.701%	2.564%	1.729%	1.818%
Conventional	$σ_{o u t} = 0.88$	1.242%	0.590%	0.623%	2.019%	1.424 %	1.489%
Annular	$σ_{i n} = 0.47$ , $σ_{o u t} = 0.72$	1.085%	0.649%	0.723%	1.874%	1.265%	1.215%
Annular	$σ_{i n} = 0.64$ , $σ_{o u t} = 0.88$	0.779%	0.479%	0.317%	1.822%	1.317%	1.338%
Quadrupole	$σ_{i n} = 0.64$ , $σ_{o u t} = 0.88$	0.867%	0.465%	0.396%	1.833%	1.215%	1.206%
Quadrupole	$σ_{i n} = 0.28$ , $σ_{o u t} = 0.55$	1.275%	0.550%	0.459%	2.192%	1.523%	1.466%
C-quadrupole	$σ_{i n} = 0.64$ , $σ_{o u t} = 0.88$	1.157%	0.677%	0.767%	2.150%	1.418%	1.415%
C-quadrupole	$σ_{i n} = 0.28$ , $σ_{o u t} = 0.55$	1.316%	0.684%	0.803%	2.197%	1.488%	1.505%

Item	Experiment Parameters
Wavelength	KrF excimer laser 248 nm
Illumination mode and coherence factor	conventional $σ_{o u t} = 0.28$ ; $σ_{o u t} = 0.88$ ;
	annular $σ_{i n} = 0.47$ , $σ_{o u t} = 0.72$ ; $σ_{i n} = 0.64$ , $σ_{o u t} = 0.88$ ;
	quadrupole $σ_{i n} = 0.64$ , $σ_{o u t} = 0.88$ ; $σ_{i n} = 0.28$ , $σ_{o u t} = 0.55$ ;
	C-quadrupole $σ_{i n} = 0.64$ , $σ_{o u t} = 0.88$ ; $σ_{i n} = 0.28$ , $σ_{o u t} = 0.55$ ;
Illumination field in mask plane ( $x * y$ )	$104 m m \times 20 m m$
Defocus values ( $Δ z$ )	dynamic gray filters 1 61.9 mm
Defocus values ( $Δ z$ )	dynamic gray filters 2 59.4 mm
IINU	$c o n v e n t i o n a l / a n n u l a r < 0.7 %$
IINU	$q u a d r u p o l e / C - q u a d r u p o l e < 0.9 %$
INU	$< 1.5 %$

Illumination	Coherence	$U_{I N U}$			$U_{N U}$
Mode	Factor	Uncorrected	Corrected (Exp)	Corrected (Sim)	Uncorrected	Corrected (Exp)	Corrected (Sim)
Conventional	$σ_{o u t} = 0.28$	1.449%	0.667%	0.701%	2.564%	1.729%	1.818%
Conventional	$σ_{o u t} = 0.88$	1.242%	0.590%	0.623%	2.019%	1.424 %	1.489%
Annular	$σ_{i n} = 0.47$ , $σ_{o u t} = 0.72$	1.085%	0.649%	0.723%	1.874%	1.265%	1.215%
Annular	$σ_{i n} = 0.64$ , $σ_{o u t} = 0.88$	0.779%	0.479%	0.317%	1.822%	1.317%	1.338%
Quadrupole	$σ_{i n} = 0.64$ , $σ_{o u t} = 0.88$	0.867%	0.465%	0.396%	1.833%	1.215%	1.206%
Quadrupole	$σ_{i n} = 0.28$ , $σ_{o u t} = 0.55$	1.275%	0.550%	0.459%	2.192%	1.523%	1.466%
C-quadrupole	$σ_{i n} = 0.64$ , $σ_{o u t} = 0.88$	1.157%	0.677%	0.767%	2.150%	1.418%	1.415%
C-quadrupole	$σ_{i n} = 0.28$ , $σ_{o u t} = 0.55$	1.316%	0.684%	0.803%	2.197%	1.488%	1.505%

Abstract

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Applied Optics