Wavelength-tunable deep-ultraviolet thin-film filter: design and experimental demonstration

Xingyue Zhu; Kaixiong Yu; Xiaofan Zhu; Chi Wu; Chi Wu; Chi Wu

doi:10.1364/AO.433093

Applied Optics
Vol. 60,
Issue 32,
pp. 10199-10206
(2021)
•https://doi.org/10.1364/AO.433093

Wavelength-tunable deep-ultraviolet thin-film filter: design and experimental demonstration

Xingyue Zhu, Kaixiong Yu, Xiaofan Zhu, and Chi Wu

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Xingyue Zhu, Kaixiong Yu, Xiaofan Zhu, and Chi Wu, "Wavelength-tunable deep-ultraviolet thin-film filter: design and experimental demonstration," Appl. Opt. 60, 10199-10206 (2021)

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Abstract

A deep-ultraviolet (DUV) narrowband tunable filter with a central wavelength of 225.0 nm is designed, fabricated, and demonstrated experimentally. The simulation results showed a transmittance of about 42.1% at 225.0 nm and a full width at half-maximum (FWHM) of ${\sim}{1.2}\;{\rm nm}$. The experimental results for normal incidence light revealed a corresponding central wavelength of 225.0 nm, a transmittance of 27.7%, and a FWHM of 1.9 nm. By changing the incident angle, the central wavelength can be tuned from 225.0 to 224.5 nm. This DUV narrowband tunable filter has been shown to demonstrate good performance and has broad applicability.

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Data underlying the results presented in this paper are not publicly available at this time but may be obtained from the authors upon reasonable request.

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Reference	Material	Central Wavelength (nm)	FWHM (nm)	Transmittance (%)	Cutoff Band (nm)	Cutoff Depth (OD)
[8]	${M g F}_{2}$ , Al	121.6	9	15	$> 160$	3
[9]	${M g F}_{2}$ , Al	120.74	12	$\sim 6$
[10]	${L a F}_{3}$ , ${M g F}_{2}$	202.5	2.5	64
[11]	${H f O}_{2}, {S i O}_{2}$	283	20	$\sim 80$
[12]	${Z r O}_{2}, {H f O}_{2}, {S i O}_{2}$	260–290		$\sim 17$	300–700	7–9
[3]	${H f O}_{2}, {S i O}_{2}$	265–290		20	300–800	7
[13]	$A l, {S i O}_{2}$	260	38	47	$> 300$
[14]	$A l, {S i O}_{2}$	290	100	27	$> 480$	2
[15]	$A l, {S i O}_{2}$	218	$\sim 32$	$\sim 23.1$	400–700	$\sim 5$
[16]	$A l, {A l}_{2} O_{3}, {A l F}_{3}$	$\sim 230$	$\sim 50$	$\sim 60$	Visible band	2
[17]	${H f O}_{2}, {S i O}_{2}, A l$	250–300	20	$\sim 18$	Visible band

Rotation Angle (°)	Central Wavelength (nm)	Peak Transmittance (%)	Maximum Sidelobe Transmittance (%)
0	225.0	27.7	7.5
5	224.8	28.0	7.4
10	223.9	27.9	7.5
15	222.3	25.8	7.4
20	220.4	24.3	7.4
25	217.7	21.5	7.5
30	214.5	7.6	3.2

Reference	Material	Central Wavelength (nm)	FWHM (nm)	Transmittance (%)	Cutoff Band (nm)	Cutoff Depth (OD)
[8]	${M g F}_{2}$ , Al	121.6	9	15	$> 160$	3
[9]	${M g F}_{2}$ , Al	120.74	12	$\sim 6$
[10]	${L a F}_{3}$ , ${M g F}_{2}$	202.5	2.5	64
[11]	${H f O}_{2}, {S i O}_{2}$	283	20	$\sim 80$
[12]	${Z r O}_{2}, {H f O}_{2}, {S i O}_{2}$	260–290		$\sim 17$	300–700	7–9
[3]	${H f O}_{2}, {S i O}_{2}$	265–290		20	300–800	7
[13]	$A l, {S i O}_{2}$	260	38	47	$> 300$
[14]	$A l, {S i O}_{2}$	290	100	27	$> 480$	2
[15]	$A l, {S i O}_{2}$	218	$\sim 32$	$\sim 23.1$	400–700	$\sim 5$
[16]	$A l, {A l}_{2} O_{3}, {A l F}_{3}$	$\sim 230$	$\sim 50$	$\sim 60$	Visible band	2
[17]	${H f O}_{2}, {S i O}_{2}, A l$	250–300	20	$\sim 18$	Visible band

Rotation Angle (°)	Central Wavelength (nm)	Peak Transmittance (%)	Maximum Sidelobe Transmittance (%)
0	225.0	27.7	7.5
5	224.8	28.0	7.4
10	223.9	27.9	7.5
15	222.3	25.8	7.4
20	220.4	24.3	7.4
25	217.7	21.5	7.5
30	214.5	7.6	3.2

Abstract

Data Availability

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Figures (12)

Tables (3)

Equations (4)

Applied Optics