Abstract

The phase-shifting technique is one of the most important techniques in interferometry. The measurement accuracy of this technique is affected by several kinds of systematic and random errors like miscalibration, nonlinear response and tilt shift of the phase shifter, nonlinear recording, speckles, fringe fluctuation, etc. In this paper, a method for verification of all of these phase measurement error sources is proposed by introducing a grayscale image. This image is composed from the lattice-site representation determined by a four step phase-shifting algorithm, which represents the distribution of phase-shift angle values. The shape of the grayscale image is definitely more expressive and demonstrative for the kinds of measurement error sources than the black dot distribution in lattice-site representation. So, with this technique, we can recognize the existence of various measurement error sources and roughly estimate their magnitudes before proceeding with experiments. Our method is to be rather qualitative than quantitative. The availability of this method is discussed in a phase-shifting Fizeau interferometer and a fringe projection profilometry. This method is useful in all kinds of interferometric measurements based on the phase-shifting technique.

© 2021 Optical Society of America

Steps length error detector algorithm in phase-shifting interferometry using Radon transform as a profile measurement

Tania A. Ramirez-delreal, Miguel Mora-Gonzalez, Francisco J. Casillas-Rodriguez, Jesus Muñoz-Maciel, and Marco A. Paz
Opt. Express 25(6) 7150-7160 (2017)

Joint least-squares algorithm correcting phase-shift errors and detector nonlinearity simultaneously in phase-shifting interferometry

Huijie Zhu and Hongwei Guo
Appl. Opt. 62(7) 1829-1839 (2023)

Extended averaging technique for derivation of error-compensating algorithms in phase-shifting interferometry

Joanna Schmit and Katherine Creath
Appl. Opt. 34(19) 3610-3619 (1995)

Linear approximation for measurement errors in phase shifting interferometry

Johannes van Wingerden, Hans J. Frankena, and Cornelis Smorenburg
Appl. Opt. 30(19) 2718-2729 (1991)

Tilt-shift error detection in phase-shifting interferometry

Krzysztof Patorski, Adam Styk, Luigi Bruno, and Piotr Szwaykowski
Opt. Express 14(12) 5232-5249 (2006)