Terahertz sensor based on a three-dimensional double I-type metamaterial integrated microfluidic channel

Jieping Yang; Hu Deng; Zhonggang Xiong; Zhonggang Xiong; Liping Shang

doi:10.1364/AO.421910

Applied Optics
Vol. 60,
Issue 13,
pp. 3816-3822
(2021)
•https://doi.org/10.1364/AO.421910

Terahertz sensor based on a three-dimensional double I-type metamaterial integrated microfluidic channel

Jieping Yang, Hu Deng, Zhonggang Xiong, and Liping Shang

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Jieping Yang, Hu Deng, Zhonggang Xiong, and Liping Shang, "Terahertz sensor based on a three-dimensional double I-type metamaterial integrated microfluidic channel," Appl. Opt. 60, 3816-3822 (2021)

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Abstract

Terahertz metamaterial sensors have received extensive attention in biosensing applications. However, sensitivity toward terahertz frequencies emitted by liquid samples remains challenging because of the strong absorption of terahertz waves by water. Here, we present a highly sensitive terahertz sensor based on a three-dimensional double I-type metamaterial integrated microfluidic channel. The designed sensor produces an inductive-capacitive (LC) resonance with a high quality factor of approximately 72, while demonstrating a maximum sensitivity of 832 GHz/RIU. Furthermore, we analyzed the relationship between the resonance frequency and ethanol concentration. These findings would promote the application of terahertz technology in label-free and rapid biomedical sensing as well as substance detection.

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Data underlying the results presented in this paper are not publicly available at this time but may be obtained from the authors upon reasonable request.

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Design		Resonance Frequency	Resonance Frequency Shift	Sensitivity	FWHM	Q Factor	FOM	Absorptivity
Ref. [11]		0.85 THz	85 GHz	85 GHz/RIU	/	/	/	/
Ref. [15]	Design1	0.6 THz	77 GHz	7 GHz/µm	/	11.6	2.3	/
Ref. [15]	Design2	0.75 THz	68 GHz	6.18 GHz/µm	/	11	1.98	/
Ref. [16]		1.65 THz	/	/	/	37	/	99.6%
Ref. [17]		1.731 THz	95.4 GHz	5.96 GHz/µm	/	60.09	/	96.4%
Ref. [21]		0.76 THz	/	0.47/RIU	/	14.4	3.7
Ref. [21]		1.28 THz	/	0.51/RIU	/	23	9.4
Ref. [22]		6.4 THz	/	3.5 THz/RIU	/	/	/	/
Ref. [24]	Design1	/	/	140 GHz/RIU	/	/	/
Ref. [24]	Design2	/	/	140 GHz/RIU	/	/	/
		/	/	150 GHz/RIU	/	/	/
Ref. [25]		2.06 THz	86 G Hz	72 G Hz/RIU		/	1.58
Ref. [26]		2.393 THz	414 GHz	520.5 GHz/RIU		1103	244	/
Ref. [33]		1.5102 THz	582 GHz	788 GHz/RIU	/	20	/	/
This work		1.44 THz	368 GHz	832 GHz/RIU	0.02 THz	72	41.6	99%

Liquid	$ε_{s}$	$τ_{1}$ [ps]	$ε_{2}$	$τ_{2}$ [ps]	$ε_{3}$	$τ_{3}$ [ps]	$ε_{\infty}$
Water	78.36	8.24	4.93	0.18	\	\	3.48
Ethanol	24.35	161	4.15	3.3	2.72	0.22	1.93

Design		Resonance Frequency	Resonance Frequency Shift	Sensitivity	FWHM	Q Factor	FOM	Absorptivity
Ref. [11]		0.85 THz	85 GHz	85 GHz/RIU	/	/	/	/
Ref. [15]	Design1	0.6 THz	77 GHz	7 GHz/µm	/	11.6	2.3	/
Ref. [15]	Design2	0.75 THz	68 GHz	6.18 GHz/µm	/	11	1.98	/
Ref. [16]		1.65 THz	/	/	/	37	/	99.6%
Ref. [17]		1.731 THz	95.4 GHz	5.96 GHz/µm	/	60.09	/	96.4%
Ref. [21]		0.76 THz	/	0.47/RIU	/	14.4	3.7
Ref. [21]		1.28 THz	/	0.51/RIU	/	23	9.4
Ref. [22]		6.4 THz	/	3.5 THz/RIU	/	/	/	/
Ref. [24]	Design1	/	/	140 GHz/RIU	/	/	/
Ref. [24]	Design2	/	/	140 GHz/RIU	/	/	/
		/	/	150 GHz/RIU	/	/	/
Ref. [25]		2.06 THz	86 G Hz	72 G Hz/RIU		/	1.58
Ref. [26]		2.393 THz	414 GHz	520.5 GHz/RIU		1103	244	/
Ref. [33]		1.5102 THz	582 GHz	788 GHz/RIU	/	20	/	/
This work		1.44 THz	368 GHz	832 GHz/RIU	0.02 THz	72	41.6	99%

Liquid	$ε_{s}$	$τ_{1}$ [ps]	$ε_{2}$	$τ_{2}$ [ps]	$ε_{3}$	$τ_{3}$ [ps]	$ε_{\infty}$
Water	78.36	8.24	4.93	0.18	\	\	3.48
Ethanol	24.35	161	4.15	3.3	2.72	0.22	1.93

Abstract

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Tables (2)

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Applied Optics