Abstract

We present the optical and structural characterization of films of ${{\rm Ta}_2}{{\rm O}_5}$, ${{\rm Sc}_2}{{\rm O}_3}$, and ${{\rm Sc}_2}{{\rm O}_3}$ doped ${{\rm Ta}_2}{{\rm O}_5}$ with a cation ratio around 0.1 grown by reactive sputtering. The addition of ${{\rm Sc}_2}{{\rm O}_3}$ as a dopant induces the formation of tantalum suboxide due to the “oxygen getter” property of scandium. The presence of tantalum suboxide greatly affects the optical properties of the coating, resulting in higher absorption loss at $\lambda=1064\,\,{\rm nm}$. The refractive index and optical band gap of the mixed film do not correspond to those of a mixture of ${{\rm Ta}_2}{{\rm O}_5}$ and ${{\rm Sc}_2}{{\rm O}_3}$, given the profound structural modifications induced by the dopant.

© 2019 Optical Society of America

Full Article  |  PDF Article
OSA Recommended Articles
Structure and morphology of low mechanical loss TiO2-doped Ta2O5

Mariana A. Fazio, Gabriele Vajente, Alena Ananyeva, Ashot Markosyan, Riccardo Bassiri, Martin M. Fejer, and Carmen S. Menoni
Opt. Mater. Express 10(7) 1687-1703 (2020)

Point defects in Sc2O3 thin films by ion beam sputtering

P. F. Langston, E. Krous, D. Schiltz, D. Patel, L. Emmert, A. Markosyan, B. Reagan, K. Wernsing, Y. Xu, Z. Sun, R. Route, M. M. Fejer, J. J. Rocca, W. Rudolph, and C. S. Menoni
Appl. Opt. 53(4) A276-A280 (2014)

Laser damage resistance of ion-beam sputtered Sc2O3/SiO2 mixture optical coatings

Mathias Mende, Stefan Schrameyer, Henrik Ehlers, Detlev Ristau, and Laurent Gallais
Appl. Opt. 52(7) 1368-1376 (2013)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (7)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Tables (3)

You do not have subscription access to this journal. Article tables are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription