Abstract

We propose a general method of designing phase-analysis algorithms for Ronchi phase-shifting lateral-shearing interferometry. Based on the expression and method, three new phase-shifting algorithms are designed to eliminate negative error effects of interference from unwanted diffraction orders, which limits the accuracy of wavefront aberration measurement. The proposed eight-, 10-, and 13-frame algorithms can eliminate the effects of the first ±5, ±9, and ±15 multi-diffraction orders, respectively. Simulation works and experimental results verify the general expression and corresponding designed method.

© 2019 Optical Society of America

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