Abstract

Synthetic aperture interferometry (SAI) is a novel way of testing aspherics and has a potential for in-process measurement of aspherics [Appl. Opt. 42, 701 (2003)]. A method to measure steep aspherics using the SAI technique has been previously reported [Appl. Opt. 47, 1705 (2008)]. Here we investigate the computation of surface form using the SAI technique in different configurations and discuss the computational errors. A two-pass measurement strategy is proposed to reduce the computational errors, and a detailed investigation is carried out to determine the effect of alignment errors on the measurement process.

© 2010 Optical Society of America

Synthetic aperture interferometry: in-process measurement of aspheric optics

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