Abstract
An analytical method has been developed for directly calculating the principal angle θp at which the phase difference between the two reflection coefficients is equal to 90° and at which the ratio of |r p| to |r s| is equal or close to a minimum. The equations given here can be used in many optical applications. For example, ellipsometric data measured at an incidence angle θp will have higher precision than data measured at other incidence angles. θp is the principal angle. Instead of three principal angles, there is only one principal angle, which can be found in the region of 0 ≤ θp ≤ 90° for most metallic materials used in applications. Results show good agreement between the measured and the calculated spectra of Δp and ρpo.
© 2002 Optical Society of America
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