Abstract
A wavelength-tuned Fizeau interferometer is applied to the problem
of flatness testing of transparent plates. When the plate is
positioned at a specific distance from the reference surface and an
integer-math 13-frame phase-shifting algorithm is applied, the system
directly filters out unwanted interference arising from backsurface
reflections. The resulting front-surface profile exhibits less than
2 nm of residual error attributable to spurious reflections from within
the plate.
© 2000 Optical Society of America
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