Abstract
We discuss a new method to estimate the absorption coefficient, the index
of refraction, and the thickness of thin films using optical transmission data
only. To solve the problem we used a pointwise constrained optimization
approach, defining a nonlinear programming problem, the unknowns of which are
the coefficients to be estimated, with linear constraints that represent prior
knowledge about the physical solution. The method applies to all kinds of
transmission spectra and does not rely on the existence of fringe patterns or
transparency. Results on amorphous semiconductor thin films and gedanken films
are reported. They show that the new method is highly
reliable.
© 1997 Optical Society of America
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