Abstract

The normal-incidence rotating-sample ellipsometer is an instrument that can be used to characterize grating surfaces from the measured ratio ρ of complex reflection coefficients r y/r x of light polarized perpendicular and parallel to the grating groove direction. Experimental results at different wavelengths for different gratings with spatial frequencies from 150 to 5880 grooves/mm are presented. The groove depth of the 5880-grooves/mm gold-coated grating can be estimated from the measured ρ and rigorous grating theory.

© 1996 Optical Society of America

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