Abstract

We describe a special filter design that produces spectrally narrow soft-x-ray radiation by using a broadband laser-produced plasma source and multilayer-coated reflecting optics. Calculations for the design were carried out at several laser-produced plasma-source temperatures and various multilayer-mirror combinations with and without a soft-x-ray filter. We determined that the best arrangement for a laser-produced plasma source consists of two multilayer mirrors and one soft-x-ray filter for each temperature investigated.

© 1995 Optical Society of America

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