Abstract

A computer-aided differential amplitude scanning optical microscope for accurate linewidth measurements is described. The operation of the system includes an experimental data treatment based on the correspondent image formation theory. Experimental results for a three-track structure are presented. The developed technique is shown to be capable of measuring submicrometer linewidths with nanometer accuracy.

© 1992 Optical Society of America

Full Article  |  PDF Article
OSA Recommended Articles
Differential amplitude scanning optical microscope: theory and applications

Chung Wah See and Mehdi Vaez-Iravani
Appl. Opt. 27(13) 2786-2792 (1988)

Differential confocal scanning microscope with a two-mode optical fiber

R. Juškaitis and T. Wilson
Appl. Opt. 31(7) 898-902 (1992)

Interferometric scanning optical microscope for surface characterization

M. Jeff Offside and Michael G. Somekh
Appl. Opt. 31(31) 6772-6782 (1992)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (3)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Tables (1)

You do not have subscription access to this journal. Article tables are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Equations (6)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription