Abstract

Two-dimensional patterns that have properties suited for optical alignment have been constructed from one-dimensional binary Barker codes. Applications include automated alignment of masks with patterns in photolithography.

© 1991 Optical Society of America

Full Article  |  PDF Article
OSA Recommended Articles
Two-dimensional multichannel optical switch

Kazuo Hogari, Kazuhiro Noguchi, and Takao Matsumoto
Appl. Opt. 30(23) 3277-3278 (1991)

Nonlinearly transformed baseband filters for optical pattern recognition

Bahram Javidi, Jun Wang, Carol Ruiz, and Jack Ruiz
Appl. Opt. 30(14) 1776-1780 (1991)

Technique for simultaneous alignment and collimation of a laser diode in an optical data storage head

Fred F. Froehlich, Mark S. Wang, and Tom D. Milster
Appl. Opt. 30(31) 4481-4483 (1991)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (1)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Tables (2)

You do not have subscription access to this journal. Article tables are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Equations (7)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription