Abstract

A contactless interference surface testing method is described that is capable of creating fringe patterns with fringe separations corresponding to a surface deformation of a quarter-wavelength of the illumination light. Contrary to common Fizeau fringes where the interference pattern occurs by superposing two wavefronts, the described method is based upon a superposition of four wavefronts. These wavefronts are created by a diffraction transmission grating which is contactlessly placed over the surface to be tested. Basically, this technique provides a beat frequency pattern with adaptable fringe separation. Practical applications of this method to semiconductor silicon wafers are presented.

© 1978 Optical Society of America

Full Article  |  PDF Article

Corrections

G. Makosch and W. Jaerisch, "Mapping of optical surfaces with quarter wavelength fringes: erratum," Appl. Opt. 17, 1990-1990 (1978)
http://proxy.osapublishing.org/ao/abstract.cfm?uri=ao-17-13-1990

OSA Recommended Articles
Interferometric surface mapping with variable sensitivity

W. Jaerisch and G. Makosch
Appl. Opt. 17(5) 740-743 (1978)

Mapping of optical surfaces with quarter wavelength fringes: erratum

G. Makosch and W. Jaerisch
Appl. Opt. 17(13) 1990-1990 (1978)

Superposition fringes as a measuring tool in optical testing

J. Schwider
Appl. Opt. 18(14) 2364-2367 (1979)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (5)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Equations (7)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription