Abstract
Using synchrotron radiation, we have measured the efficiency at an angle of incidence of of a holographic ion-etched spherical blazed grating and three of its fourth-generation replicas. The measured efficiency profile of replicas 1 and 3 prior to multilayer coating oscillated from thin-film interference produced by the replicas' structure. A Mo2C∕Si multilayer coating was applied to the master grating and replicas 1 and 2. After coating, the maximum grating efficiency occurred in the order and the maximum values were at for the master and at for replicas 1 and 2. On the basis of measurements obtained after coating, the derived groove efficiency was for the master, for replica 1, and for replica 2. The groove efficiency of the uncoated replica 3 was at . We find that the replicas are reasonably faithful copies of the ion-etched master, and models based on measured atomic force microscope groove profiles are in general agreement with measured results. However, subtle issues remain regarding the widths of the peak order profile and the location of its maximum wavelength.
© 2006 Optical Society of America
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