Integrated atomic force microscope and ultrafast sampling probe

John A. Nees; Shinichi Wakana; Chun-Ying Chen

doi:10.1364/UP.1994.WA.4

Ultrafast Phenomena
Technical Digest Series (Optica Publishing Group, 1994),
paper WA.4
•https://doi.org/10.1364/UP.1994.WA.4

Integrated atomic force microscope and ultrafast sampling probe

John A. Nees, Shinichi Wakana, and Chun-Ying Chen

International Conference on Ultrafast Phenomena 1994

California United States
2–6 May 1994
ISBN:

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High Spatial and Temporal Resolution (WA)

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J. A. Nees, S. Wakana, and C. Chen, "Integrated atomic force microscope and ultrafast sampling probe," in Ultrafast Phenomena, Technical Digest Series (Optica Publishing Group, 1994), paper WA.4.

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Abstract

The reduction of line dimensions in integrated circuits and the increase in the device speeds has led to the need for high-speed probes with sub-micron spatial resolution. This need is addressed by combining Atomic Force Microscopy (AFM), with its sub-nanometer spatial resolution, and photoconductive sampling, with single picosecond temporal resolution.[1]

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