Abstract

Real-time gas analysis on-a-chip was demonstrated using a mid-infrared (mid-IR) microcavity. Optical apertures for the microcavity were made of ultrathin silicate membranes embedded in a silicon chip using the complementary metal-oxide-semiconductor (CMOS) process. CH4, CO2, and N2O were selected as analytes due to their strong absorption bands at λ = 3.25 – 3.50 µm, 4.20 – 4.35 µm.

© 2018 The Author(s)

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