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Conferences > Sensors > 2022 > SM1C > SM1C.4

A Microturbine Flow Sensor Created on an Optical Fiber Tip Using Multiphoton Nanomachining Process

Jeremiah C. Williams, Hengky Chandrahalim, Joseph S. Suelzer, and Nicholas G. Usechak

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Abstract

We report a microturbine flow sensor built onto the tip of an optical fiber by multiphoton nanomachining process. A dynamic microturbine is engineered to reflect light in response to incident fluid flow.

© 2022 The Author(s)

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